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Fabrication of ll-nm-Wide Silica-Like Lines Using X-Ray Diffraction Exposure |
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| Authors: | ZHU Xiao-Li XIE Chang-Qing ZHANG Man-Hong LIU Ming CHEN Bao-Qin PAN Feng |
| Institution: | [1]Laboratory of Advanced Materials, Department of Materials Science and Engineering, Tsinghua University, Beijing 100084 [2]Key Laboratory of Nano-fabrication and Novel Devices Integrated Technology, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029 |
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