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Effect of Carbonized Conditions on Residual Strain and Crystallinity Quality of Heteroepitaxial Growth 3C-SiC Films |
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| Authors: | CHEN Da ZHANG Yu-Ming ZHANG Yi-Men WANG Yue-Hu TANG Xiao-Yan |
| Institution: | School of Microelectronics, Xidian University, Xi＇an 710071 |
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