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Annealing Behaviour of Helium Bubbles in Titanium Films by Thermal Desorption Spectroscopy and Positron Beam Analysis
作者姓名:刘超卓  周筑颖  施立群  王宝义  郝小鹏  赵国庆
作者单位:[1]Applied Ion Beam Physics Laboratory, Institute of Modern Physics, Fudan University, Shanghai 200433 [2]Laboratory of Nuclear Analysis Technique, Institute of High Energy Physics, Chinese Academy of Sciences, Beijing 100049 [3]College of Physics Science and Technology, China University of Petroleum (East China), Dongying 257061
基金项目:Supported by the National Natural Science Foundation of China under Grant Nos 10176008, 50131050 and 10475016.
摘    要:Helium-containing Ti Glms are prepared using magnetron sputtering in the helium-argon atmosphere. Isochronal annealing at different temperatures for an hour is employed to reveal the behaviour of helium bubble growth. Ion beam analysis is used to measure the retained helium content. Helium can release largely when annealing above 970K. A thermal helium desorption spectroscopy system is constructed for assessment of the evolution of helium bubbles in the annealed samples by linear heating (OAK/s) from room temperature to 1500K. Also, Doppler broadening measurements of positron annihilation radiation spectrum are performed by using changeable energy positron beam. Bubble coarsening evolves gradually below 680K, migration and coalescence of small bubbles dominates in the range of 68-970 K, and the Ostwald ripening mechanism enlarges the bubbles with a massive release above 970K.

关 键 词:薄膜    退火行为  热吸附  正电子
收稿时间:2007-2-10
修稿时间:2007-02-10

Annealing Behaviour of Helium Bubbles in Titanium Films by Thermal Desorption Spectroscopy and Positron Beam Analysis
LIU Chao-Zhuo,ZHOU Zhu-Ying,SHI Li-Qun,WANG Bao-Yi,HAOXiao-Peng,ZHAO Guo-Qing.Annealing Behaviour of Helium Bubbles in Titanium Films by Thermal Desorption Spectroscopy and Positron Beam Analysis[J].Chinese Physics Letters,2007,24(8):2357-2360.
Authors:LIU Chao-Zhuo  ZHOU Zhu-Ying  SHI Li-Qun  WANG Bao-Yi  HAOXiao-Peng  ZHAO Guo-Qing
Institution:1.Applied Ion Beam Physics Laboratory, Institute of Modern Physics, Fudan University, Shanghai 200433 2 Laboratory of Nuclear Analysis Technique, Institute of High Energy Physics, Chinese Academy of Sciences, Beijing 100049 3 College of Physics Science and Technology, China University of Petroleum (East China
Abstract:Helium-containing Ti films are prepared using magnetron sputtering in the helium--argon atmosphere. Isochronal annealing at different temperatures for an hour is employed to reveal the behaviour of helium bubble growth. Ion beam analysis is used to measure the retained helium content. Helium can release largely when annealing above 970K. A thermal helium desorption spectroscopy system is constructed for assessment of the evolution of helium bubbles in the annealed samples by linear heating (0.4K/s) from room temperature to 1500K. Also, Doppler broadening measurements of positron annihilation radiation spectrum are performed by using changeable energy positron beam. Bubble coarsening evolves gradually below 680K, migration and coalescence of small bubbles dominates in the range of 680--970K, and the Ostwald ripening mechanism enlarges the bubbles with a massive elease above 970K.
Keywords:68  55  Ln  68  43  Vx  78  70  Bj
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