Sodium superionic conductor sputter-deposited coatings

Thin sodium superionic conductor (Nasicon) coatings are deposited on rotating substrates by co-sputtering in the reactive mode of a Zr-Si and a Na₃PO₄ target. The influence of the discharge current and of the target-to-substrate distance is investigated owing to the targeted Na₃Zr₂Si₂PO₁₂ stoichiometry. A thermo-structural analysis shows that the amorphous as-deposited coating of convenient composition crystallises around 700 °C in the monoclinic structure. Electrical measurements performed at room temperature after various annealing treatments indicate a ionic conductivity of about 2·10⁻³ S·cm⁻¹, consistent with that of bulk Nasicon. Paper presented at the Patras Conference on Solid State Ionics — Transport Properties, Patras, Greece, Sept. 14 – 18, 2004.