Deformable mirrors based on piezoelectric unimorph microactuator array for adaptive optics correction

This paper describes a piezoelectric deformable mirror (DM) for adaptive optics (AO) applications, with a 100 μm thick silicon mirror driven by 61 unimorph microactuators. Measurement results show that the stroke of the DM is ~ 7.4 μm at 100 V, and the resonance frequency is at 18 kHz. To demonstrate the correction capability of the DM, low-order Zernike modes up to 14th term were reproduced. Furthermore, a close-loop correction of laser beam in a 633 nm helium-neon laser system was performed. After system aberrations being compensated, a focal spot approximate to Airy disk was achieved.