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Sensitivity investigation of the different direction vibrations of a SNOM probe
Authors:Deng-Maw Lu
Institution:Institute of Mechatronic Science and Technology, Southern Taiwan University, No.1, Nantai Street, Tainan 710, Taiwan
Abstract:In this article, we analyze the sensitivity of lateral, axial, and torsional vibration of a scanning near-field optical microscope (SNOM) probe. An exact solution for the title problem is obtained using the theory of beam and torsional vibrations. Sensitivities are obtained for a wide range of the intervening physical parameters. This paper discusses the relationship between the sensitivity of a SNOM probe and its geometry. The analysis is presented for a probe in three different cases lateral vibration, axial vibration, and torsional vibration, for a fixed-free configuration. To derive the mathematical relation between the probe and sample (by utilizing springs and damping to simulate different environments) through the process of theory analysis for different environments. Thus a universal touchless SNOM probe sensitivity controller is developed for appropriate control and adjustment of the probe sensitivity suitable under different environments. Such controller helps the SNOM probe achieve the nanoscale resolution through proper control and adjustment probe sensitivity in accordance to changes to different environments and reduce the chance of being damaged during the scan, which in the end further advances the sample inspection technique.
Keywords:Lateral vibration  Axial vibration  Torsional vibration  Sensitivity investigate
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