A Two-coordinate digital detector for microscopy in the soft X-ray region |
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| Authors: | N N Salashchenko M V Svechnikov N I Chkhalo A V Sherbakov |
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| Institution: | 1. Institute for the Physics of Mictrostructures, Russian Academy of Sciences, Afonino, Nizhni Novgorod oblast, 603950, Russia
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| Abstract: | A detector is developed for a microscope operating in the soft X-ray region. Main detector characteristics are given. Spatial resolution is less than 1 μm. For the high-aperture optical lens with numerical aperture NA = 0.55, the efficiency of converting X-ray energy to visible light collected on its charge-coupled device (CCD) camera is 2.8%. Owing to the optical part of the detector, it is possible to change the microscope’s resolution and field of view when measuring. |
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