Fabrication of electrode Pt nanotubes for semiconductor capacitors |
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| Authors: | BI Seo UA Shaislamov S-W Kim H-K Kim SK Hong B Yang |
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| Institution: | aKumoh National Institute of Technology, Department of Advanced Nano Materials for Information Technology, 1 Yangho-dong, Gumi-si, Gyeongbuk 730-701, Republic of Korea;bHynix Semiconductor Inc., Memory R & D Division, New Device Team, Icheon-si, Kyoungki-Do 467-701, Republic of Korea |
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| Abstract: | Template-wetting process was used to fabricate Pt electrode nanotubes for the further application in 3D nanotube capacitors. Anodic alumina oxide (AAO) was used as a template, which can be fabricated by means of two-step anodization process. After the wetting process, released Pt nanotubes have been obtained by selective etching of the template using KOH solution. Pt nanotubes formation and tube walls morphology were investigated by FE-SEM technique. Furnace annealing (FA) effects at temperatures ranging from 200 to 600 °C with 100oC step on nucleation and crystal growth condition of Pt nanotubes have been examined. Crystallization of the Pt nanotube inside the template has been examined by step-by-step annealing at different temperatures, and confirmed by XRD. |
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| Keywords: | Pt Anodization Nanotube Polymer Template wetting |
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