纳米颗粒材料表面形貌结构AFM表征中针尖干扰的修正与评价

原子力显微镜（ＡＦＭ）被广泛地用来进行纳米尺度和亚微米尺度结构材料的形貌表征，其优点是制样简单、无需进行导电处理，但会针尖与样品作用时，由于针尖自身的成像作用，导致得到的图像结果比实际结果要大，这就是针尖的放大效应，文章基于一种简单的数学模型，得到了对实测图像的修正结果，对于一般金字塔形针尖，ＡＦＭ的放大作用可导致粒子尺寸比真实尺寸大近２倍，实测图像的失真状况与针尖的形状因子、粒子的分散状态等因素

EVOLUTION AND QUANTITATIVE CORRECTION OF DISTORTIONS IN ATOMIC FORCE MICROSCOPE IMAGES

Atomic force microscopy (AFM) is widely used in morphology characterization of materials on the nanometer and sub micron level. However distortions are inevitably present in AFM images due to geometrical interaction between the sample surface and the tip. Correction factors for AFM images are given based on a simple mathematical model. The distortions of the images are affected by the shape of the AFM tip and distribution of the particles. The results are in agreement with experiment.