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微纳米加工技术在纳米物理与器件研究中的应用
引用本文:顾长志,罗强,杨海方,金爱子,李俊杰,王宗利,王强,徐鹏,全保刚,岳双林,黄阳,时成瑛.微纳米加工技术在纳米物理与器件研究中的应用[J].物理,2006,35(1):40-46.
作者姓名:顾长志  罗强  杨海方  金爱子  李俊杰  王宗利  王强  徐鹏  全保刚  岳双林  黄阳  时成瑛
作者单位:中国科学院物理研究所凝聚态物理国家实验室,北京,100080
摘    要:物质在纳米尺度下可能呈现出与体材料不同的物理特件,这正是纳米科技发展的基础之一。要想探索在纳米尺度下材料物埋性质的变化规律及可能的应用领域,离不开相应的技术手段,微纳米加工技术作为当今高技术发展的重要技术领域之一,是实现功能人工纳米结构与器件微纳米化的基础。本文根据几个不同的应用领域,介绍了微纳米加工技术在纳米物理与器件研究领域的应用。

关 键 词:微纳米加工技术  人工纳米结构  纳米物理与器件
收稿时间:2005-10-17
修稿时间:2005-10-17

Applications of micro/nanofabrication in nanoscale physics and devices
GU Chang-Zhi,LUO Qiang,YANG Hai-Fang,JIN Ai-Zi,LI Jun-Jie,WANG Zong-Li,WANG Qiang,XU Peng,QUAN Bao-Gang,YUE Shuang-Lin,HUANG Yang,SHI Cheng-Ying.Applications of micro/nanofabrication in nanoscale physics and devices[J].Physics,2006,35(1):40-46.
Authors:GU Chang-Zhi  LUO Qiang  YANG Hai-Fang  JIN Ai-Zi  LI Jun-Jie  WANG Zong-Li  WANG Qiang  XU Peng  QUAN Bao-Gang  YUE Shuang-Lin  HUANG Yang  SHI Cheng-Ying
Institution:Beijing National Laboratory for Condetsed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing, 100080, China
Abstract:Nanoscate materials exhibit novel physical properties different from macro systems, which has led to the rise of nanoscience and nanotechnology. It is necessary to develop appropriate methods to study the properties of such materials and their potential applications. Micro/nanofabrication technologies offer a controllable approach for patterning the structures and devices down to the nanometer scale, and are rapidly finding applications in many fields. We review some current examples in the research on nanoscale physics and devices.
Keywords:micro/nanofabrication  artificial nanostructure  nanoscale physics and devices
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