Manufacturing at Nanoscale: Top-Down,Bottom-up and System Engineering |
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Authors: | Zhang Xiang Sun Cheng Fang Nicholas |
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Institution: | (1) Center for Scalable and Integrated Nanomanufacturing, Department of Mechanical and Aerospace Engineering, University of California, Los Angeles, CA, 90095 |
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Abstract: | The current nano-technology revolution is facing several major challenges: to manufacture nanodevices below 20 nm, to fabricate three-dimensional complex nano-structures, and to heterogeneously integrate multiple functionalities. To tackle these grand challenges, the Center for Scalable and Integrated NAno-Manufacturing (SINAM), a NSF Nanoscale Science and Engineering Center, set its goal to establish a new manufacturing paradigm that integrates an array of new nano-manufacturing technologies, including the plasmonic imaging lithography and ultramolding imprint lithography aiming toward critical resolution of 1–10 nm and the hybrid top-down and bottom-up technologies to achieve massively parallel integration of heterogeneous nanoscale components into higher-order structures and devices. Furthermore, SINAM will develop system engineering strategies to scale-up the nano-manufacturing technologies. SINAMs integrated research and education platform will shed light to a broad range of potential applications in computing, telecommunication, photonics, biotechnology, health care, and national security. |
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Keywords: | nanoscale manufacturing plasmonic imaging lithography ultra-molding and imprinting hybrid top-down and bottom-up process system engineering |
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