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Dip-coated HNR120 photoresists thin-film optical waveguides
Authors:Ghanshyam K Singh  Yik Seng Yong
Institution:Faculty of Engineering and Technology, Multimedia University, Jalan Ayer Keroh Lama, 75450 Melaka, Malaysia
Abstract:We report on our systematic and detailed study of fabrication and characterization of HNR120 photoresists thin-film optical waveguides. Various waveguide properties, such as refractive index, optical losses as a function of temperature, waveguide thickness, dispersion and birefringence have been studied. The optical loss are found to be <1.4 dB cm−1.
Keywords:HNR120  Thin films  Optical waveguides  Refractive index  Optical loss
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