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Function of liquid and tool wear in ultrasonic bound-abrasive polishing of fused silica with different polishing tools
Authors:Chenghu Zhou  Qiuhui Zhang  Changtao He  Yaguo Li
Institution:1. School of Electrical Information and Engineering, Henan Institute of Engineering, Zhengzhou 451191, China;2. Xinjiang Astronomical Observatory, Chinese Academy of Sciences, Urumqi 830011, China;3. Fine Optical Engineering Research Center, Chengdu 610041, China
Abstract:The recently proposed fixed-abrasive polishing process was revisited, but this paper focuses mainly on the potential influence of various liquids and the different kinds of pellets on the polishing process as well as the wear of pellet in ultrasonic assisted and conventional processes. The results show that using liquids is helpful in improving surface quality and lowering surface roughness. In particular, the surface roughness is improved sharply for pore-free pellet, from >80 nm to <1 nm (avg.) and the polishing process smoothly proceed that otherwise will hardly progress without liquids. However, the liquids do not necessarily always improve polishing process. There is an optimal volume for a specific polishing process. Moreover, the wear of pellet was also evaluated as well. The results suggest that applying ultrasonics can effectively alleviate the wear loss of pellet and increase the “G-ratio” of polishing process.
Keywords:Fixed-abrasive polishing  Ultrasonic vibration polishing  Wear of polishing tool  Fused silica glass  Polishing fluids
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