Visualization of plasma source ion implantation for arrays of multiple targets |
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Authors: | Keiter ER Booske JH Hitchon WNG |
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Institution: | Parallel Comput. Sci., Sandia Nat. Labs., Albuquerque, NM, USA; |
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Abstract: | Visualization of sheath overlap dynamics during plasma source ion implantation (PSII) of a multiple-target array is used to illustrate the effect of target spacing on dose uniformity over the surface of a single target. The simulations are conducted using a hybrid plasma model, and the images are created using the Tecplot package by Amtec. The simulations suggest scaling rules for sheath overlap time as a function of target spacing. |
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