| 利用多束飞秒激光干涉在金属箔和金属薄膜上形成阵列孔 |
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| 引用本文： | 赵全忠,邱建荣,赵崇军,姜雄伟,朱从善.利用多束飞秒激光干涉在金属箔和金属薄膜上形成阵列孔[J].中国物理 B,2005,14(6):1181-1184. |
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| 作者姓名： | 赵全忠 邱建荣 赵崇军 姜雄伟 朱从善 |
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| 作者单位： | Photon Craft Project, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences and Japan Science and Technology Agency, Shanghai 201800, China;Photon Craft Project, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences and Japan Science and Technology Agency, Shanghai 201800, China;Photon Craft Project, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences and Japan Science and Technology Agency, Shanghai 201800, China;Photon Craft Project, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences and Japan Science and Technology Agency, Shanghai 201800, China;Photon Craft Project, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences and Japan Science and Technology Agency, Shanghai 201800, China |
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| 基金项目： | Project supported by the National Natural Science Foundation of China (Grant No: 50125208), Shanghai Science and Technology Committee (Grant No: 04dz05112), China Postdoctoral Science Foundation, and K. C. Wong Education Foundation, Hong Kong. |
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| 摘 要： | 报道了利用五束飞秒激光干涉，在镍箔和镀在玻璃上的铝膜上制备阵列孔的方法。光学显微镜和扫描电镜观察发现飞秒激光照射后在金属箔和薄膜上形成了微米量级的阵列孔。这一技术允许一步、大尺寸、微米量级的加工金属材料，具有潜在的工业应用价值。
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| 关 键 词： | 排列微结构 飞秒激光 衍射束分裂 光学干涉 |
| 收稿时间： | 2004-09-16 |
Formation of arrayed holes on metal foil and metal film by multibeam interfering femtosecond laser beams |
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| Zhao Quan-Zhong,Qiu Jian-Rong,Zhao Chong-Jun,Jiang Xiong-Wei and Zhu Cong-Shan.Formation of arrayed holes on metal foil and metal film by multibeam interfering femtosecond laser beams[J].Chinese Physics B,2005,14(6):1181-1184. |
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| Authors: | Zhao Quan-Zhong Qiu Jian-Rong Zhao Chong-Jun Jiang Xiong-Wei and Zhu Cong-Shan |
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| Institution: | Photon Craft Project, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences and Japan Science and Technology Agency, Shanghai 201800, China |
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| Abstract: | We report on an optical interference method to fabricate arrayed holes on metal nickel foil and aluminum film deposited on glass substrate by means of five-beam interference of femtosecond laser pulses. Optical microscope and scanning electron microscope observations revealed that arrayed holes of micrometer-order are fabricated on both metal foil and metal film. The present technique allows one-step, large-area, micrometer processing of metal materials for potential industrial applications. |
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| Keywords: | array microstructure interference femtosecond laser diffractive beam splitter |
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