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Semi-quantitative study on the Staebler--Wronski effect of hydrogenated amorphous silicon films prepared with HW-ECR-CVD system |
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| Authors: | Ding Yi Liu Guo-Han Chen Guang-Hu He De-Yan Zhu Xiu-Hong Zhang Wen-Li He Bin Zhang Xiao-Kang Tian Ling and Ma Zhan-Jie |
| Institution: | School of Physical Science and Technology, Lanzhou University, Lanzhou 730000, China; The Key Laboratory of Advanced Functional Materials, Ministry of Education of China, Beijing University of Technology, Beijing 100022, China |
| Abstract: | The method of numerical simulation is used to fit the relationship between the photoconductivity in films and the illumination time. The generation and process rule of kinds of different charged defect states during illumination are revealed. It is found surprisingly that the initial photoconductivity determines directly the total account of photoconductivity degradation of sample. |
| Keywords: | hydrogenated amorphous silicon Staebler--Wronski effect microwave electron cyclotron hbox{\hskip 1 9cm} resonant chemical vapour deposition charged defects |
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