Deposition of carbon nitride films for space application |
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Authors: | Feng Yu-Dong Xu Chao Wang Yi and Zhang Fu-Jia |
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Institution: | Physics Department, Lanzhou University, Lanzhou 730000, China; Lanzhou Institute of Physics, Lanzhou 730000, China |
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Abstract: | Carbon nitride thin films were prepared by electron-beam evaporation
assisted with nitrogen ion bombardment and TiN/CNx composite films were by
unbalanced dc magnetron sputtering, respectively. It was found that the
sputtered films were better than the evaporated films in hardness and
adhesion. The experiments of atomic oxygen action, cold welding, friction
and wearing were emphasized, and the results proved that the sputtered
TiN/CNx composite films were suitable for space application. |
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Keywords: | CNx film hardness atomic oxygen cold welding friction wear |
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