| The reliability of measurements on electron energy distribution function in silane rf glow discharges |
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| 作者姓名： | 林揆训 林璇英 池凌飞 余楚迎 姚若河 余云鹏 |
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| 作者单位： | Department of Physics, Shantou University, Shantou 515063, China;Department of Physics, Shantou University, Shantou 515063, China;Department of Physics, Shantou University, Shantou 515063, China;Department of Physics, Shantou University, Shantou 515063, China;Department of Physics, Shantou University, Shantou 515063, China;Department of Physics, Shantou University, Shantou 515063, China |
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| 基金项目： | Project supported by the National Natural Science Foundation of China (Grant No 19830533) and by the State Key Development Program for Basic Research of China (Grant No G2000028208). |
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| 摘 要： | Electron energy distribution function(EEDF) is a key parameter of plasmas,which is driectly proportional to the second derivative of the probe I-V characteristics,Because of an amplifying effect of unavoidable noises in the experimental probe I-V curves during the derivation process,the experimental I-V curves should be smoothed before performing the numerical derivation,This paper investigates the effect of adjustable factors used in the smoothing process on the deduced second derivative of the I-V curves,and an optimum group of the adjustable factors is selected to make the rms deviation of the smoothed I-V curves from the measured curves less than 1%,A simple differentiation circuit is designed and used to measure the EEDF parameter straghtforwardly.It is the first time,so far as we know,to measure the EEDF parmeters simultaneously by means of both numerical and circuit derivative methods under the sae discharge conditions and on the smae discharge equipment.The deviation between two groups of mean electron energy E and elcetron density ne obtained by the above different methods is within about 7%.This apparently improves the reliability of the measurements of the EEDF parameters.
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| 关 键 词： | 等离子体 电子能量分布函数 I－V特征曲线 |
| 收稿时间： | 2/7/2002 12:00:00 AM |
The reliability of measurements on electron energy distribution function in silane rf glow discharges |
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| Lin Kui-Xun,Lin Xuan-Ying,Chi Ling-Fei,Yu Chu-Ying,Yao Ruo-He and Yu Yun-Peng.The reliability of measurements on electron energy distribution function in silane rf glow discharges[J].Chinese Physics B,2003,12(2):198-203. |
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| Authors: | Lin Kui-Xun Lin Xuan-Ying Chi Ling-Fei Yu Chu-Ying Yao Ruo-He and Yu Yun-Peng |
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| Institution: | Department of Physics, Shantou University, Shantou 515063, China |
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| Abstract: | Electron energy distribution function (EEDF) is a key parameter of plasmas, which is directly proportional to the second derivative of the probe I-V characteristics. Because of an amplifying effect of unavoidable noises in the experimental probe I-V curves during the derivation process, the experimental I-V curves should be smoothed before performing the numerical derivation. This paper investigates the effect of adjustable factors used in the smoothing process on the deduced second derivative of the I-V curves, and an optimum group of the adjustable factors is selected to make the rms deviation of the smoothed I-V curves from the measured curves less than 1%. A simple differentiation circuit is designed and used to measure the EEDF parameter straightforwardly. It is the first time, so far as we know, to measure the EEDF parameters simultaneously by means of both numerical and circuit derivative methods under the same discharge conditions and on the same discharge equipment. The deviation between two groups of mean electron energy E and electron density n_e obtained by the above different methods is within about 7%. This apparently improves the reliability of the measurements of the EEDF parameters. |
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| Keywords: | Langmuir probe reliability numerical derivation circuit derivation |
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