溅射的同位素迷惑

影响多元材料溅射的机制是复杂的．在多元材料溅射中，同位素溅射是最简单的．虽然仅有质量效应在同位素溅射中起优势作用，但是在离子轰击溅射中，至今仍然是个“同位素迷惑”．争论的焦点有:（１）在零剂量时，同位素富集度是与出射角无关，还是与出射角有关？（２）同位素角效应是一次溅射效应，还是二次溅射效应？如何理解碰撞级联中的动量不对称性对同位素溅射的作用？文中综述了这些争论，并阐明了本小组的观点． Mechanisms affecting multicomponent material sputtering are complex. Isotope sputtering is the simplest in the multicomponent materials sputtering. Although only mass effect plays a dominant role in the isotope sputtering, there is still an isotope puzzle in suputtering by ion bombardment. The major arguments are as follows:(1) At the zero fluence, is the isotope enrichment ejection angle independent or ejection angle dependent? (2)Is the isotope angular effect the primary or the ...

Isotope Puzzle in Sputtering

Mechanisms affecting multicomponent material sputtering are complex. Isotope sputtering is the simplest in the multicomponent materials sputtering. Although only mass effect plays a dominant role in the isotope sputtering, there is still an isotope puzzle in suputtering by ion bombardment. The major arguments are as follows:(1) At the zero fluence, is the isotope enrichment ejection angle independent or ejection angle dependent? (2)Is the isotope angular effect the primary or the ...