| α-Si1-xCx:H薄膜材料的弹性反冲探测分析 |
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| 引用本文： | 周平,路秀琴,郭继宇,赵葵,吴伟明,隋丽,倪嵋楠,梅俊平,罗红兵,刘建成.α-Si1-xCx:H薄膜材料的弹性反冲探测分析[J].原子核物理评论,2004,21(3):249-252. |
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| 作者姓名： | 周平 路秀琴 郭继宇 赵葵 吴伟明 隋丽 倪嵋楠 梅俊平 罗红兵 刘建成 |
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| 作者单位： | [1]中国原子能科学研究院核物理所,北京102413[2]广西大学物理科学与工程技术学院。广西南宁530004 |
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| 基金项目： | 国际原子能机构(IAEA)支持的国际合作项目(CPR-11314) |
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| 摘 要： | 介绍在中国原子能科学研究院HI-13串列加速器上，对α-Si1-xCx:H薄膜样品进行弹性反冲探测分析的方法和结果．用该加速器提供的高品质^127Ⅰ束流轰击α-Si1-xCx:H薄膜材料样品，用△E(gas)一E(PSD)望远镜探测器，在前角区(30。角)测量从该样品中反冲的各元素的能谱．然后用离子束分析(IBA)程序SIMNRA对能谱进行拟合，得到样品中H，C和Si的比分及深度分布．Elastic recoil detection analysis of α-Si_(1-x)C_(x)∶H foils has been performed at the HI-13 tandem accelerator of CIAE. High quality~(127)I beam bombards the target of α -Si_(1-x)C_(x)∶H_( ) thin film. A ΔE(gas)-(E(PSD)) telescope was used to measure the energy spectra of all elements recoiled from the samples at the angle of 30° in laboratory system. Components of H, C and Si and the profiles were obtained by simulation of the energy spectra using the program SIMNRA calculation.
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| 关 键 词： | 非晶氢化硅碳薄膜 弹性反冲探测分析 能隙宽度 △E-E望远镜探测器 能谱拟合 |
| 文章编号： | 1007-4627(2004)03-0249-04 |
| 收稿时间： | 1900-01-01 |
| 修稿时间： | 2003年12月19 |
Elastic Recoil Detection Analysis of α-Si1-xCx:H Thin Films |
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| Institution: | (1 China Institute of Atomic Energy; Beijing 102413; China;2 Department of Physics; Guangxi University; Nanning 530004; Guangxi; China); |
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| Abstract: | Elastic recoil detection analysis of α-Si_(1-x)C_(x)∶H foils has been performed at the HI-13 tandem accelerator of CIAE. High quality~(127)I beam bombards the target of α -Si_(1-x)C_(x)∶H_( ) thin film. A ΔE(gas)-(E(PSD)) telescope was used to measure the energy spectra of all elements recoiled from the samples at the angle of 30° in laboratory system. Components of H, C and Si and the profiles were obtained by simulation of the energy spectra using the program SIMNRA calculation. |
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