高精度干涉检验移相算法对振动误差的免疫能力

对移相干涉测量中影响移相稳定性，从而产生测量误差的小幅度机械振动进行了研究，建立了振动误差模型，仿真分析了Wyant84b三步算法、Hariharan87五步算法、七步算法和十三步算法4种不同移相算法对振动的免疫能力。模拟结果显示，十三步算法对振动的免疫能力最好，与已发表文献成果吻合，说明本文的模拟具有较高的可信度，在一定程度上能够对影响干涉仪精度的振动误差进行合理预测，并能够起到评价和筛选移相算法的作用。

Immunity of phase shifting algorithms to vibration errors in high-accuracy interferometry

As vibration errors are the crucial source of error in a high accuracy interferometric test, this paper researches the effect of mechanical vibration on the phase shifting stability. It establishes vibration error models and simulates the immunity of vibration by using the three-step algorithm, five-step algorithm, seven-step algorithm and thirteen-step algorithm, respectively. The results show that the thirteen-step algorithm is the best in immunizing the vibration. For the results agreed with that in other literature, it proves the simulation in this paper is believable. To some extent, the method can give a reasonable prediction of the vibration error which effects the precision of interferometer and it also can evaluate and select the algorithm of phase shifting.