氧化型垂直腔面发射激光器的常见失效模式和机理分析

氧化型垂直腔面发射激光器(VCSEL)在高速光通信中有着广泛的应用,应用过程中的可靠性是一个非常重要的指标,要求有高寿命和低失效率。为了更好地了解VCSEL在应用过程中的失效模式和机理,提升器件的可靠性,本文从器件设计、加工制造和应用过程等3个环节总结分析了氧化型VCSEL的常见失效模式、产生原因和机理,并提出了适当的改善措施和建议。其中,对氧化应力、静电放电和湿气腐蚀这3个主要失效因素进行了更为详细的分析。基于以上对业界研究工作的总结和分析,最后对实际工作中遇到的VCSEL失效案例进行简单的介绍,为VCSEL学者、研发设计、制造和使用人员提供一个较为全面的失效分析案例库。

Common failure modes and mechanisms in oxide vertical cavity surface emitting lasers

Oxide Vertical Cavity Surface Emitting Lasers(VCSELs)are widely used in high-speed optical communications.The reliability of VCSELs is a very important index that requires a high lifetime and low failure rate in the application process.Understanding the root causes and mechanisms of VCSEL failure is necessary and helpful to improve device reliability.In this paper,we summarize and analyze the most com-mon failure modes,causes and mechanisms observed in oxide VCSELs from the perspective of design,man-ufacturing and application,then apply some appropriate measures and suggestions to prevent or improve them.Moreover,the three dominating factors leading to the failure of VCSELs including oxide layer stress,Electronic Static Discharge(ESD)and humidity corrosion are introduced in more detail.At last,we simply introduce the VCSEL failure cases encountered in the actual accelerated aging verification process.This art-icle can be used as a good VCSEL failure analysis library for chip development and production researchers.