| 用白光相移干涉增大表面形貌可测范围的研究 |
| |
| 引用本文： | 周明宝,林大键,郭履容,郭永康.用白光相移干涉增大表面形貌可测范围的研究[J].光学学报,2000,20(8):065-1071. |
| |
| 作者姓名： | 周明宝 林大键 郭履容 郭永康 |
| |
| 作者单位： | 1. 中国科学院光电技术研究所微细加工光学技术国家重点实验室,成都,610209
2. 四川大学物理系,成都,610041 |
| |
| 摘 要： | 分析研究了我相移干涉应用于表面形貌测量时表面形貌与干涉图像之间的关系，比较了两种不同光谱分布的光束的白光相移干涉特性。依据白光相移干涉中与干涉光强有关的一些特定参量与表面形貌之间的一一对应关系，提出了一种不直接测量相位、避开相位测量不确定性的新方法。所提方法扩大了可测深度范围，可用于测量面形较陡的连续表面或不连续深结构表面。
|
| 关 键 词： | 相移干涉 表面形貌 测量 白光 干涉法 |
| 收稿时间： | 1998/11/2 |
Expanding Depth Measurement Range by White-Light Phase-Shifting Interferometry |
| |
| Zhou Mingbao,Lin Dajian,Guo Lvrong,Guo Yongkang.Expanding Depth Measurement Range by White-Light Phase-Shifting Interferometry[J].Acta Optica Sinica,2000,20(8):065-1071. |
| |
| Authors: | Zhou Mingbao Lin Dajian Guo Lvrong Guo Yongkang |
| |
| Abstract: | A new approach for measuring the surface profile is presented. It measures the surface profile not by measuring phase but by measuring the parameters, which is relative to the white light phase shifting interferometric intensity and monotonic function of the depth of the tested surface in the given measurement range. Advantage of the approach is that the depth measurement range is expanded very much, it can be used to measure the profile of the deep or discontinuous surface. |
| |
| Keywords: | phase shifting interferometry surface profile measurement |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
