光学薄膜界面互相关特性的确定

本文实验测量了光学薄膜的散射波场分布,根据多层光学薄膜的矢量散射理论,确定了膜层界面的互相关特性.当空间频率较低时,对于膜层层数较少的膜系,膜堆内的各界面是完全相关的;若空间频率较高,则逐渐趋于部分相关模型.实验指出,膜层界面的互相关特性亦与所采用的蒸发技术有关.

Determination of interface cross-correlation properties of optical coatings

Measurements have been made of the scattered field distribution of optical films. The interface cross-correlation properties have been determined according to the vector so ttering theory for multilayer optical coatings. In the case of a few layer number, the interfaces in optical films are fully correlated and partially correlated respectively at the lower and higher spatial frequencies of the interface irregularity. It is shown that the interface cross-correlation properties also depend on the vapouring techniques used.