| 用于动态测量的双通道光学相位测量轮廓术 |
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| 引用本文： | 任守强,方强.用于动态测量的双通道光学相位测量轮廓术[J].光学学报,1997,17(4):52-455. |
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| 作者姓名： | 任守强 方强 |
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| 作者单位： | [1]西北核技术研究所 [2]西安交通大学应用物理系 |
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| 摘 要： | 提出了利用编码光两个采样值实现相位测量轮廓术的原理。设计了一种偏振分光双通道测量系统，实现了两个采样值的同时记录，因而实现了动态测量，拓展了相位测量轮廓术的应用范围。文中给出了实验结果。
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| 关 键 词： | 相位测量 轮廓术 双通道系统 动态测量 信息光学 |
| 收稿时间： | 1996/4/6 |
Two Channel Phase Measuring Profilometry Used in Dynamic Measurement |
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| Ren Shouqiang.Two Channel Phase Measuring Profilometry Used in Dynamic Measurement[J].Acta Optica Sinica,1997,17(4):52-455. |
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| Authors: | Ren Shouqiang |
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| Abstract: | A new method of phase measuring profilometry, which uses only two samples of the coded intensity, is presented. By using polarization property, a two channel measuring system is designed, by which the two samples can be recorded simultaneously. Based on this system, the phase measuring profilometry can be used in the measurement of dynamic profile. This method broadens the application range of the measuring profilometry. The experimental results verify the reliability of the proposed methods. |
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| Keywords: | phase measuring profilometry two channel system dynamic measurement |
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