KBA显微镜成像系统的成像模拟及X光成像实验的研究

KBA显微镜是一种非轴对称、非共轴的掠入射成像系统。其结构复杂,调节精度要求很高,在实际成像实验操作中难以掌握其成像特性。利用光学设计软件模拟其成像,对系统的调节和成像分析提供有益的参考。利用光学设计软件ZEMAX模拟了KBA显微镜对点源的成像过程,给出了KBA显微镜成像系统的焦深约为1 mm,景深为50 mm左右。并且由模拟可知,掠入射角对成像的影响很大。对像素尺寸约10μm的探测设备,模拟得出KBA成像系统的空间分辨力上限为3μm左右。基于星光Ⅱ装置对周期为20μm的网格靶成像,获得了KBA显微镜较为清晰的X光图像。该项工作为进一步开展掠入射成像系统的研究奠定了基础。

Imaging Simulation of KBA Microscope System and X-Ray Imaging Experiment

KBA microscope is a type of non-symmetrical and non-coaxial grazing incidence imaging system. Its configuration is complex, the adjustment precision is high, so that in practical experiment the imaging performance of KBA microscope is not easy to master. Imaging simulation by using optical design saftwave ZEMAX is made to provide valuable reference for adjustment and imaging analysis. The imaging process of KBA microscope for point source is simulated by using ZEMAX. The depth of focus and depth of field of KBA microscope are about 1 mm and 50 mm respectively. The grazing angle affects the imaging greatly according to the simulation. The upper limit of the spatial resolution of KBA microscope is 3 μm for the detector whose pixel is about 10 μm by simulation. The clear X-ray image of KBA microscope is obtained for the grid target whose period is 20 μm based on XINGGUANG Ⅱ facility, which establishes the base for advanced study of developing grazing imaging system.