微结构特性的光学测试平台

微结构是微机电系统的基本元件，其几何尺寸、运动特性、材料及力学特性直接影响微机电系统的整体性能。提出一种将计算机微视觉、米劳显微干涉、频闪成像和激光多普勒测振等技术充分融合的微结构静态和动态特性的光学测试平台，分别对微谐振器的平面和离面周期运动特性和微机械扭转镜的离面瞬时运动特性进行测试研究。实验结果表明，利用计算机微视觉和频闪成像技术能够实观微结构的平面位移、运动相位及喈振频率等周期运动参量的测试．位移的重复精度为30nm；利用显微干涉和频闪成像技术可实现微结构的离面位移及表面扭曲等周期运动参量的测试．位移的重复精度为3nm；激光多普勒测振技术具有在频域上对微结构瞬态运动进行分析的优点．是时域上周期运动测试的重要补充。

Optical Measurement Platform for Micro-Structures Characterization

Micro-structures are a few typical elements of micro-electromechanical system (MEMS). The physical dimensions, motion characteristics, material and mechanical properties have important influences on the system performance of MEMS device. An optical measurement platform for static and dynamic characteristics of micro-structures is put forward. Computer micro-vision, Mirau microscopic interferometry, stroboscopic photography and laser Doppler vibrator are integrated into this platform. In-plane and out-of-plane periodic motion characteristics of micro-resonator are measured, and out-of-plane transient motion of micro-mirror is analyzed. In-plane displacement, motion phase and resonance frequency can be measured by integrating computer micro-vision with stroboscopic photography, and the repeatable accuracy of in-plane displacement is 30 nm. Out-of-plane displacement and tolerance can be measured by integrating Mirau microscopic interferometry with stroboscopic photography, and the repeatable accuracy of out-of-plane displacement is 3 nm. Laser Doppler vibrator has an advantage of analyzing the motion in frequency domain, and it is the complementarity of measuring periodic motion in time domain.