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X射线荧光分析中X射线管原级能谱分布的测定
引用本文:纪新明,王建业,贾文红,朱节清,黄宜平.X射线荧光分析中X射线管原级能谱分布的测定[J].光学学报,2006,26(4):34-638.
作者姓名:纪新明  王建业  贾文红  朱节清  黄宜平
作者单位:上海复旦大学微电子系,上海,200433
摘    要:确切知道X射线管激发的原级能谱分布是X射线荧光分析中的一个重要前提,所用能谱分布函数的准确度大大影响了最终的测量结果。提出利用间接测量法,选用合适的参量模型来描述X射线的原级能谱分布。依靠实验测得的厚靶纯元素样品的荧光强度,利用已知的理论公式,建立非线性方程,优化得到参量模型中的参量值。通过比较实验测得的元素的荧光强度值和利用得到的能谱分布函数计算的理论值,证明此种方法是可行的。

关 键 词:X射线光学  X射线荧光分析  质量吸收系数  荧光强度  最小二乘方优化方法
文章编号:0253-2239(2006)04-0634-5
收稿时间:2005-03-30
修稿时间:2005-08-02

Determination of Primary Energy Spectrum Distribution of X-Ray Tube in X-Ray Fluorescence Analysis
Ji Xinming,Wang Jianye,Jia Wenhong,Zhu Jieqing,Huang Yiping.Determination of Primary Energy Spectrum Distribution of X-Ray Tube in X-Ray Fluorescence Analysis[J].Acta Optica Sinica,2006,26(4):34-638.
Authors:Ji Xinming  Wang Jianye  Jia Wenhong  Zhu Jieqing  Huang Yiping
Institution:Department of Mieroeleetronies , Fudan University, Shanghai 200433
Abstract:A premise of X-ray fluorescence analysis is the determined acquisition of the primary energy spectral distribution emitted by the X-ray tube,and the energy spectral distribution function affects the accuracy of the final measurement greatly.An indirect approach to determine the primary energy spectral distribution of X-ray is derived,which includes relaying on the X-ray fluorescent intensities measured from the pure element sample of the thick target,establishing nonlinear functions with the known theoretical formula and obtaining the parameters in the parameter model through optimization. The comparison of the fluorescent intensity of the elements measured in the experiment and the theoretical value calculated with the energy spectral distribution function proves the approach valid.
Keywords:X-ray optics  X-ray fluorescence  mass-absorption coefficient  fluorescent intensity  the least-square optimizing method
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