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| 两重外腔的自混合干涉及其信号分析 | |
| 引用本文： | 王鸣,聂守平,李达成.两重外腔的自混合干涉及其信号分析[J].光学学报,2003,23(6):29-733. |
| 作者姓名： | 王鸣 聂守平 李达成 |
| 作者单位： | 1. 南京师范大学物理科学与技术学院光电技术江苏省重点实验室,南京,210097;南昌大学物理系,南昌,330029 2. 南京师范大学物理科学与技术学院光电技术江苏省重点实验室,南京,210097 3. 清华大学精密测试技术与仪器国家重点实验室,北京,100084 |
| 基金项目： | 国家自然科学基金，江苏省自然科学基金资助课题。 |
| 摘 要： | 提出了具有两重外腔的自混合干涉。根据半导体激光器的自混合干涉理论，研究了两重外腔自混合干涉模型，及其信号的调制和解调方法。该方法用一个附加的参考反射镜在半导体激光器(LD)和目标间形成两重外腔，参考外腔用于补偿光学频率涨落引入的相位误差。用快速傅立叶变换相位探测技术(FFT)分析自混合干涉信号。运用这些方法，可提高相位测量精度，在微光机电系统、光学工程和其他工程应用上有潜在的实用价值。 |
| 关 键 词： | 半导体激光器 两重外腔 傅里叶变换方法 自混合干涉 光学计量 相位补偿 信号调制 信号解调 |
| 收稿时间： | 2002/2/15 |
Self-Mixing Interferometry of Dual External Cavities and Its Signal Analysis |
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| Wang Ming , Nie Shouping Li Dacheng Jiangsu Province Key Laboratory of Optoelectronic Technology,School of Physical Science and Technology,Nanjing Normal University,Nanjing.Self-Mixing Interferometry of Dual External Cavities and Its Signal Analysis[J].Acta Optica Sinica,2003,23(6):29-733. | |
| Authors: | Wang Ming Nie Shouping Li Dacheng Jiangsu Province Key Laboratory of Optoelectronic Technology School of Physical Science and Technology Nanjing Normal University Nanjing |
| Institution: | Wang Ming 1,2 Nie Shouping1 Li Dacheng3 1 Jiangsu Province Key Laboratory of Optoelectronic Technology,School of Physical Science and Technology,Nanjing Normal University,Nanjing 210097 2 Department of Physics,Nanchang University,Nanchang 330029 3 State Key Laboratory of Precision Measuring Technology and Instruments,Tsinghua University,Beijing 100084 |
| Abstract: | A novel self-mixing interferometry (SMI) with dual external cavities was proposed. The model of interference, as well as the modulation and demodulation of interference signal are analyzed. The developed technique uses an additional reference reflector to form dual external cavities between the LD and the target, and reference external cavity is used to compensate the phase error due to optical frequency fluctuation. FFT phase detection technique was applied to analyze SMI signal. By using these techniques, the high precision measurement can be obtained. It is a promising technique used in microelectromechanical systems (MEMS), optical engineering and other engineering application. |
| Keywords: | optical metrology self-mixing interferometry Fourier transform method dual external cavities semiconductor laser |
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