| 二元矩形软X射线衍射光栅的标量区衍射理论 |
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| 引用本文： | 邵建达,易葵.二元矩形软X射线衍射光栅的标量区衍射理论[J].光学学报,1998,18(1):9-102. |
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| 作者姓名： | 邵建达 易葵 |
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| 作者单位： | 中国科学院上海光学精密机械研究所光学薄膜中心 |
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| 摘 要： | 利用标量区衍射理论分析了正交二元矩形软Ｘ射线衍射光栅的光学特性，给出了理论设计的初步结果。
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| 关 键 词： | 衍射光栅 标量区 软X射线 正交二元光栅 |
| 收稿时间： | 1996/12/16 |
An Optical Design of 3-D Diffraction Grating in Soft X-Ray Spectra Based on Scalar Theory |
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| Abstract: | An asymptotic formalism used in the scalar domain is derived for studying the behavior of three-dimension diffraction gratings used in small groove pitch and near normal incidence for soft X-ray. The theory is applied to study 3-D lamellar gratings and results in a preliminary design. |
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| Keywords: | diffraction gratings scalar domain soft X-ray |
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