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| 大面积均匀纳米金刚石薄膜制备研究 | |
| 引用本文： | 龚辉,范正修,姜辛,Klages C P.大面积均匀纳米金刚石薄膜制备研究[J].光学学报,2002,22(6):18-722. |
| 作者姓名： | 龚辉 范正修 姜辛 Klages C P |
| 作者单位： | 1. 中国科学院上海光学精密机械研究所,上海,201800 2. Fraunhofer-IST of Film and Surface Engineering,Germany 3. 中国科学院上海光学精密机械研究所,上海,201800;Fraunhofer-IST of Film and Surface Engineering,Germany |
| 基金项目： | 中国科学院和德国夫琅和费研究院交流项目资助课题 |
| 摘 要： | 报道了一种利用偏压恒流等离子辅助热丝化学气相沉积城硅基板上制备大面积均匀纳米金刚石薄膜的新工艺，在不同沉积条件下研究了纳米金刚石薄膜的成核和生长过程，并通过扫描电镜、拉曼光谱和表面粗糙度测试仪观察了纳米金刚石薄膜的结构特征。最后成功制备了直径100mm、平均晶粒尺寸10nm的光滑纳米金刚石薄膜。 |
| 关 键 词： | 制备 热丝化学气相沉积 纳米金刚石薄膜 等离子辅助 |
Synthesis of Uniform and Large Area Nano-Diamond Film |
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| Klages C P.Synthesis of Uniform and Large Area Nano-Diamond Film[J].Acta Optica Sinica,2002,22(6):18-722. | |
| Authors: | Klages C P |
| Abstract: | A new process is presented for preparing uniform and large area nano diamond film on Si substrates using a bias assisted and constant current controlled hot filament chemical vapor deposition. The nucleation and growth of nano diamond films under different parameters were investigated. The nano diamond films were measureed by scan electron microscope (SEM), Raman spectroscopy and surface roughness measurement system. The smooth nano diamond film with diameter 100 mm and average particle size of 10 nm was prepared. |
| Keywords: | hot filament chemical vapor deposition nano diamond film plasma asistance |
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