| 应用移相干涉术测量量块长度和长度变动量 |
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| 引用本文： | 葛爱明,陈进榜,陈磊,朱日宏,严家骅,牛立新,朱振宇,任冬梅.应用移相干涉术测量量块长度和长度变动量[J].光学学报,2002,22(2):49-252. |
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| 作者姓名： | 葛爱明 陈进榜 陈磊 朱日宏 严家骅 牛立新 朱振宇 任冬梅 |
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| 作者单位： | 1. 南京理工大学电光学院,南京,210094
2. 国防科工委第一计量测试研究中心,北京,100095 |
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| 摘 要： | 研究了应用移相干涉术测量新的一等量块的方法。对于干涉图像进行多幅图的采样，由移相法计算量块测量面和与其研全的辅助平晶表面的波面面形，着重研究了在量块干涉图中有阶跃不连续的波面复原运算的原理与技术，得到一幅表征它们表面的离散滤差值，并给出量块工作面长度和长度变动量的测量结果。
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| 关 键 词： | 量块 长度变动量 移相干涉术 测量 长度计量 |
Dynamic Argument Using Shift Phase Interferometry |
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| Ge Aiming Chen Jinbang Chen Lei Zhu Rihong Yan Jiahua Niu Lixin Zhu Zhenyu Ren Dongmei ,School of Electronic Engineering and Optoelectric Technology,Nanjing University of Science and Technol.Dynamic Argument Using Shift Phase Interferometry[J].Acta Optica Sinica,2002,22(2):49-252. |
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| Authors: | Ge Aiming Chen Jinbang Chen Lei Zhu Rihong Yan Jiahua Niu Lixin Zhu Zhenyu Ren Dongmei School of Electronic Engineering and Optoelectric Technology Nanjing University of Science and Technol |
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| Institution: | Ge Aiming 1) Chen Jinbang 1) Chen Lei 1) Zhu Rihong 1) Yan Jiahua 2) Niu Lixin 2) Zhu Zhenyu 2) Ren Dongmei 2) 1),School of Electronic Engineering and Optoelectric Technology,Nanjing University of Science and Technol |
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| Abstract: | The method of measuring new first-grade gauge block by phase-shift interferometry has been studied. Firstly, multi-frame interference patterns are captured by CCD, then the shape of the measured surface of the gauge and the assistant reference flat to be wrung are obtained by phase-shift arithmetic. In particular, the unwrapping wavefront principle and technology are studied when there are step and discontinuity in the gauge interference patterns. The discrete wave error is calculated, which is fitted to be a continuous and smooth surface. The measurement results of guage block length and dynamic argument are given. |
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| Keywords: | guage block length dynamic argument shift-phase interferometry |
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