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含预反馈的激光自混合干涉型位移测量结构
引用本文:禹延光,姚建铨,叶会英.含预反馈的激光自混合干涉型位移测量结构[J].光学学报,2002,22(3):08-312.
作者姓名:禹延光  姚建铨  叶会英
作者单位:1. 天津大学精密仪器与光电子工程学院,教育部光电信息技术科学开放实验室,天津,300072;郑州大学电子工程系,郑州,450052
2. 天津大学精密仪器与光电子工程学院,教育部光电信息技术科学开放实验室,天津,300072
3. 郑州大学电子工程系,郑州,450052
基金项目:国家自然科学基金 (6 0 1780 39),河南省自然科学基金 (0 1110 6 0 2 0 0 )资助课题
摘    要:提出了含预反馈的激光自混合干涉型位移测量结构,建立了系统模型,经理论分析和实验验证,结果表明,该结构具有提高温度量程,提高测量信号信噪比及获得粗糙表面的锯齿干涉信号等特点。

关 键 词:半导体激光  自混合干涉  预反馈  位移测量结构

A Self-Mixing Infterference Structure with Pre-Feedback Used for Measuring Displacement
Yu Yanguang , Yao Jianquan Ye Huiying ,College of Precision Instrument and Opto\|Electronics Engineering,Optoelectronic Information \ \ Science and Technology Laboratory,Tianjin University,Tianjin ,Electronic.A Self-Mixing Infterference Structure with Pre-Feedback Used for Measuring Displacement[J].Acta Optica Sinica,2002,22(3):08-312.
Authors:Yu Yanguang  Yao Jianquan Ye Huiying  College of Precision Instrument and Opto\|Electronics Engineering  Optoelectronic Information \ \ Science and Technology Laboratory  Tianjin University  Tianjin  Electronic
Institution:Yu Yanguang 1),2) Yao Jianquan 1) Ye Huiying 2) 1),College of Precision Instrument and Opto\|Electronics Engineering,Optoelectronic Information \ \ Science and Technology Laboratory,Tianjin University,Tianjin 300072 2),Electronic
Abstract:A new self mixing interference structure including the pre feedback is proposed and its model is established. It is confirmed by computer simulating and experiment that the pre feedback one can extend the measuring range and increase the signal to noise ratio and obtain the sawtooth interference signal from a rough surface. \{
Keywords:semiconductor\} laser  self  mixing interference  pre  feedback  displacement measurement
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