采用正弦微窗光栅的位移传感器

研制了一种新型的光栅位移传感器，它采用了一种被作者称为正弦微窗光栅的新元件作为指示光栅，用于消除光栅信号中的高次谐波，所为正弦微穿光栅是一种由许多微小的正弦穿孔排列组成的光栅。介绍了采用光学图形发生器和刻蚀镀膜工艺制造这种光栅的方法。并将制成的正弦微穿光栅用于光栅位移传感器的设计。实验表明，新型传感器能够很好地抑制光栅信号中的高次谐波，可将高次谐波总旧降至基波的２％以下。

A Displacement Encoder Using Sine Micro-Window Grating

A novel displacement encoder employing a sine micro window grating is developed. It features high quality signals free from harmonic errors. The sine micro window grating is a special component composed of arrays of micro elements with a sine window at the center of each element. The prototype is successfully manufactured by employing optical pattern generator and lithography technology and practically used in the design of an optical encoder. Experiments show that the harmonic errors of encoder signals is reduced to less than 2% of the fundamental wave.