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溶胶—凝胶法制备高强度二氧化硅增透膜的研究
引用本文:汤中苗 朱从善. 溶胶—凝胶法制备高强度二氧化硅增透膜的研究[J]. 光学学报, 1998, 18(2): 42-246
作者姓名:汤中苗 朱从善
作者单位:中国科学院上海光学精密机械研究所
摘    要:以正硅酸乙酯(TEOS)为原料,用溶胶-凝胶(SOL-GEL)法在碱性催化条件下制睾一氧化硅膜,经氨气氛和热处理工艺,提高了二氧化硅透膜的拭和抗氙灯辐照能力,可用于激光器泵浦光学元件的增透。在570-800nm范围内,双面涂的K9下班的平均透过率可提高到98%以上。

关 键 词:溶胶-凝胶法 二氧化硅 增透膜 光学元件 高强度
收稿时间:1996-11-29

Study on the Strengthened Antireflective Coatings Prepared from Sol Gel Process
Tang Jiamiao Zhu Congshan. Study on the Strengthened Antireflective Coatings Prepared from Sol Gel Process[J]. Acta Optica Sinica, 1998, 18(2): 42-246
Authors:Tang Jiamiao Zhu Congshan
Abstract:High antireflective coatings were dip coated by sol gel method with tetraethylorthosilicate (TEOS) as precursor and ammonia as catalyst. Base heat treatment was used to strengthen the coatings. The strengthened coatings possess remarkable abrasive/scratch and irradiative resistance. The coatings can be used on the optical pumping elements in high power laser system. The obtained average transmittance of the coatings within 570~800 nm band can be increased up to more than 98%.
Keywords:sol gel   SiO 2   Antirefleclive coating   strengthening.  
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