| 正入射全自动扫描反射率绝对值光谱仪的研制 |
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| 引用本文： | 苏毅,陈良尧,马宏舟,冯星伟,周仕明,钱佑华.正入射全自动扫描反射率绝对值光谱仪的研制[J].光学学报,1994,14(5):39-543. |
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| 作者姓名： | 苏毅 陈良尧 马宏舟 冯星伟 周仕明 钱佑华 |
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| 作者单位： | 复旦大学李政道物理学综合实验室 |
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| 摘 要： | 采用Ｍ型棱镜分光束法研制了一台全自动扫描绝对反射率光谱仪，测量光谱范围为３５０ｎｍ～８２０ｎｍ（１．５～３．５ｅＶ），样品入射角为５°，测量和数据采集处理全过程由计算机控制．测量绝对值精度优于±１％，测量重复性优于０．１％．采用本谱仪对热蒸发金膜和（１１１）锗本征体单晶进行测量，获得了与椭偏测量以及文献报道相一致的结果．
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| 关 键 词： | 光学常数 反射率 棱镜 光谱仪 |
| 收稿时间： | 1993/6/2 |
A New Design of Normal Incidence Scanning Reflectometer |
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| Su Yi, Chen Liangyao, Ma Hongzhou, Feng Xinwei, Zhou Shiming, Qian Youhua.A New Design of Normal Incidence Scanning Reflectometer[J].Acta Optica Sinica,1994,14(5):39-543. |
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| Authors: | Su Yi Chen Liangyao Ma Hongzhou Feng Xinwei Zhou Shiming Qian Youhua |
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| Abstract: | A new type of the normal incidence scanning reflectometer, in which a M-type prism is used to split light beam, has been designed and constructed. The incident angle is about 5° and the photon energy region is from 1.5 to 3.5 eV. The measurement is controlled automatically by a computer. The measureing precision is about 0.01. |
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| Keywords: | optical constant refractive index spectrum prism |
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