| 用像差逐项优化法装调离轴三反射镜光学系统 |
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| 引用本文： | 杨晓飞,张晓辉,韩昌元.用像差逐项优化法装调离轴三反射镜光学系统[J].光学学报,2004,24(1):15-120. |
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| 作者姓名： | 杨晓飞 张晓辉 韩昌元 |
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| 作者单位： | 中国科学院长春光学精密机械与物理研究所国家光学机械质检中心,长春,130022 |
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| 摘 要： | 在对复杂光学系统粗装调完成之后 ,利用自准干涉检验的办法 ,采集光学系统各视场的干涉图 ,然后用干涉条纹分析软件算出整个系统波前误差 ,其量值用泽尼克系数来表示 ,通过泽尼克系数与系统的波像差的关系 ,判断要调整的目标值 ,即当前在光学系统中占主导地位的波前误差 ,对主导误差优化 ,得到系统的失调量 ,由光学设计软件确定其正确后 ,进行一次精密装调。然后进行多次这样的计算机迭代和优化 ,直到光学系统达到最好的调整状态。运用此方法来装调大口径 ,长焦距离轴三反射镜系统 ,在波长λ等于 6 32 .8nm时 ,该离轴三反射镜系统中心视场波像差均方根值达到了 0 .0 94λ ,+1°视场和 - 1°视场的均方根值分别为 0 .10 6λ和 0 .12 5λ。
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| 关 键 词： | 像差逐项优化法 泽尼克系数 计算机辅助装调 自准干涉检验 波前误差 三反射镜系统 |
| 收稿时间： | 2002/12/2 |
Alignment of a Three-Mirror Off-Axis Aspherical Optical System by Using Gradual Abberration Optimization |
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| Yang Xiaofei Zhang Xiaohui Han Changyuan.Alignment of a Three-Mirror Off-Axis Aspherical Optical System by Using Gradual Abberration Optimization[J].Acta Optica Sinica,2004,24(1):15-120. |
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| Authors: | Yang Xiaofei Zhang Xiaohui Han Changyuan |
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| Abstract: | By collecting interferograms of several fields of optical system by means of autocollimating interferometry,aberrations including spherical,coma,astigmatism,could be obtained from those interferograms. The misalignments of the system are then corrected according to the misalignment values calculated by gradual aberration optimization. This way is feasibility for correcting the misalignment of optical system. A three-mirror,unobscured,high-resolution optical system with large aperture,long focal length was aligned and the results of 0° field wavefront error of 0.094λ rms, +1° field of 0.106λ rms and -1° field of 0.125λ rms at λ=632.8 nm are obtained. |
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| Keywords: | applied optics computer-aided alignment gradual aberration optimization Zernike coefficient |
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