| 用于绝对距离测量的波长扫描干涉仪信号分析 |
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| 引用本文： | 王勇,廖延彪,田芊.用于绝对距离测量的波长扫描干涉仪信号分析[J].光学学报,1999,19(4):44-551. |
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| 作者姓名： | 王勇 廖延彪 田芊 |
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| 作者单位： | 1. 清华大学电子工程系,北京,100084
2. 清华大学精密仪器系,北京,100084 |
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| 摘 要： | 提出了一种可用于绝对距离测量的波长扫描光纤干涉仪。在时域和频域上，对其输出信号进行了研究。理论分析了法布里－珀罗腔多光束干涉所产生的干扰以及扫描过程中波长的随机漂移对输出信噪比的影响。由此提出了外腔光源结构和加工精度的要求，并设计了相应的信号处理算法，达到了距离测量所要求的０．０５μｍ的精度和０．０１μｍ的分辨率
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| 关 键 词： | 光纤干涉仪 波长扫描 绝对距离 信号分析 |
| 收稿时间： | 1997/11/3 |
Signal Analysis of Wavelength Scanning Interferometry for Absolute Distance Measurement |
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| Wang Yong,Liao Yanbiao,Tian Qian.Signal Analysis of Wavelength Scanning Interferometry for Absolute Distance Measurement[J].Acta Optica Sinica,1999,19(4):44-551. |
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| Authors: | Wang Yong Liao Yanbiao Tian Qian |
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| Abstract: | A novel wavelength scanning fiber-optic interferometer for absolute distance measurement has been proposed. The output signals from two interferometers are analyzed in time and frequency domains. The influence of multi-beam interferences, and the relation between the signal to noise ratio and the random drifts of the scanning wavelength are deduced. From those deductions, some demands upon the design and production of the tunable external-cavity semiconductor laser are posed. Based on the conclusions in this paper and the digital signal processing techniques, an effective algorithm is established. So that the precision of 0.05 μm and resolution of 0.01 μm can be satisfied. |
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| Keywords: | fiber optic interferometer wavelength scanning absolute distance signal analysis |
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