| 双波长绝对距离外差干涉仪的研究 |
| |
| 引用本文： | 赵洋,周挺,李达成. 双波长绝对距离外差干涉仪的研究[J]. 光学学报, 1999, 19(9): 274-1278 |
| |
| 作者姓名： | 赵洋 周挺 李达成 |
| |
| 作者单位： | 1. 清华大学精密测试技术及仪器国家重点实验室,北京,100084
2. Calimetrics Inc, 815 Atlantic Avenue Suite 105, Alameda, CA 94501-2274, U.S.A. |
| |
| 摘 要： | 提出了一种采用双纵模稳频激光器的新型绝对距离测量外差干涉仪。该干涉仪探测两个波长各自的外差信号， 通过测量两信号的相位差， 直接测量出合成波的小数级次。指出了两波长间的相互耦合对测量精度的影响， 提出了补偿方法， 在２５ ｍ 的测量范围取得了 １４０ μｍ 的测量精度。
|
| 关 键 词： | 外差干涉仪 绝对距离干涉术 相位测量 模耦合 |
| 收稿时间： | 1997-12-10 |
Study on a Dual-Wavelength Absolute Distance Heterodyne Interferometer |
| |
| Zhao Yang,Zhou Ting,Li Dacheng. Study on a Dual-Wavelength Absolute Distance Heterodyne Interferometer[J]. Acta Optica Sinica, 1999, 19(9): 274-1278 |
| |
| Authors: | Zhao Yang Zhou Ting Li Dacheng |
| |
| Abstract: | An absolute distance heterodyne interferometer using a dual-longitudinal mode He-Ne laser is proposed. In this interferometer an optical heterodyne technique is used to enhance the signal/noise ratio of its opto-electrical signals. By measuring the phase difference between these two heterodyne signals, the fractional fringe of the synthetic wavelength is measured precisely and directly. Also the influence on the measuring accuracy from the mode coupling is analyzed. The compensation for this error is discussed. An accuracy of 140 μm in 25 m is obtained. |
| |
| Keywords: | heterodyne interferometer absolute distance interferometry phase measurement mode coupling. |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
