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热丝CVD生长金刚石薄膜喇曼散射研究
引用本文:张晓峰,庄志诚.热丝CVD生长金刚石薄膜喇曼散射研究[J].光学学报,1993,13(11):93-998.
作者姓名:张晓峰  庄志诚
作者单位:华东师范大学物理系,华东师范大学物理系,华东师范大学物理系,华东师范大学物理系,上海交通大学应用物理系 上海200062 中国科学院上海冶金所离子束开放实验室,上海200050,上海200062 中国科学院上海冶金所离子束开放实验室,上海200050,上海200062 中国科学院上海冶金所离子束开放实验室,上海200050,上海200062 中国科学院上海冶金所离子束开放实验室,上海200050,上海200030
摘    要:本文报道热丝化学气相沉积法(HFCVD)生长金钢石薄膜的喇曼散射结果。选取多种峰型,对金钢石薄膜喇曼谱(110-1800cm-1)采用最小二乘法进行非线性拟合,得到最佳拟合模型,其计算得到的拟合曲线怀实验谱图符合得较好。该模型揭示,石墨D峰(1355cm-1)是金刚石薄膜喇曼谱中不可缺少的一个组份,并且结合石墨D峰和金刚石喇曼的空间相关线型,可以解释金刚石喇曼区特殊峰形的物理机制,拟合参量的进一步

关 键 词:金刚石  薄膜  喇曼效应  气相沉积
收稿时间:1992/9/9

Study of Raman scattering in diamond film prepared by hot filament chemical vapor deposition
ZHANG Xiaofeng ZHUANG Zhicheng XU Ning ZHANG Guangfu ZHENG Zhihao.Study of Raman scattering in diamond film prepared by hot filament chemical vapor deposition[J].Acta Optica Sinica,1993,13(11):93-998.
Authors:ZHANG Xiaofeng ZHUANG Zhicheng XU Ning ZHANG Guangfu ZHENG Zhihao
Abstract:Raman scattering of diamond films prepared by hot filament CVD method has been measured. Raman spectra (1100-1800 cm-1) of diamond films were fitted by using a nonlinear least squares method with several lineshape functions. The best fit model was obtained which indicates that 1355 cm-1 peak for graphite D-band is an indispensable component of Raman structure of diamond films. The calculated curves agree well with the experimental Raman data. Moreover, with consideration of both graphite D-band and spatial correlation lineshapes, physical aspect of special line shape of Raman peak in diamond area can be explained. With further analysis of fitted parameters, quality of diamond crystalline and diamond content in diamond films can be shown. Good results in fitting several Raman spectra of diamond films indicate that the new fitting model is applicable.
Keywords:diamond-like film  Raman scattering  nonlinear fit  
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