| 镜像光衍射技术及其在测量中的应用 |
| |
| 引用本文： | 王冬云,杨国光.镜像光衍射技术及其在测量中的应用[J].光学学报,2001,21(9):103-1106. |
| |
| 作者姓名： | 王冬云 杨国光 |
| |
| 作者单位： | 浙江大学现代光学仪器国家重点实验室!杭州310027，浙江大学微系统研究和开发中心，杭州310027，浙江大学现代光学仪器国家重点实验室!杭州310027，浙江大学微系统研究和开发中心，杭州310027，浙江大学现代光学仪器国家重点实验室!杭州310027 |
| |
| 基金项目： | 国家自然科学基金 (6 98470 0 1)资助课题 |
| |
| 摘 要： | 对光衍射技术提出了一种新方法，即在衍射缝后引入反射形成镜像，用以改变衍射条纹的光强分布，这种方法可提高测量精度，加大动态范围，改善因缝不理想所形成的场分布，还对参数的选取进行了讨论。
|
| 关 键 词： | 光衍射 镜像 光学测量 在线测量 光强分布 参数选取 |
Diffraction Technique of Mirror Image and Its Application in Measurement |
| |
| Wang Dongyun, Yang Guoguang, Cong Hong ,State Key Laboratory of Modern Optical Instruments,Zhejiang University,Hangzhou ,Micro System Center for Research and Development,Zhejiang University,Hangzhou.Diffraction Technique of Mirror Image and Its Application in Measurement[J].Acta Optica Sinica,2001,21(9):103-1106. |
| |
| Authors: | Wang Dongyun Yang Guoguang Cong Hong State Key Laboratory of Modern Optical Instruments Zhejiang University Hangzhou Micro System Center for Research and Development Zhejiang University Hangzhou |
| |
| Abstract: | Aiming at the improvement of the normal diffraction technique, a kind of new method is presented. The reflection is introduced to form mirror image. By this way, the light intensity distribution of the diffraction fringe can be changed to improve the measuring accuracy, increase the dynamic range, and restrain the degradation of the field distribution caused by the unevenness of the slot. The parameter preferences are discussed. |
| |
| Keywords: | diffraction inteference of mirror image optical measurement online measurement |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
