| C60薄膜的准分子激光刻蚀及形貌分析 |
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| 引用本文： | 谢燕燕,李缙.C60薄膜的准分子激光刻蚀及形貌分析[J].光学学报,1995,15(9):254-1257. |
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| 作者姓名： | 谢燕燕 李缙 |
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| 作者单位： | 中国科学院上海光学精密机械研究所，上海机械工业部材料研究所 |
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| 摘 要： | 报道了准分子ＸｅＣｌ（３０８ｎｍ）紫外激光刻蚀Ｃ６０膜的实验研究及对刻蚀薄膜的形貌分析。基于形貌分析的结果提出其刻蚀机理。
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| 关 键 词： | 富勒烯 薄膜 激光刻蚀 碳60 |
| 收稿时间： | 1994/8/16 |
Excimer Ultraviolet Laser Ablation of C_(60) Films and Its Morphology Analysis |
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| Xie Yanyan, Wu Zhengliang, Ning Dong, Lou Qihong.Excimer Ultraviolet Laser Ablation of C_(60) Films and Its Morphology Analysis[J].Acta Optica Sinica,1995,15(9):254-1257. |
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| Authors: | Xie Yanyan Wu Zhengliang Ning Dong Lou Qihong |
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| Abstract: | In this paper, experimental study on excimer XeCl (308 nm) ultraviolet laser ablation of C60 films and their morphology analysis are reported. A possible mechanism is presented on the basis of the morphology analysis. |
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| Keywords: | fullerenes thin film laser ablation |
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