| 光波导覆层热膨胀系数对应力双折射影响的分析 |
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| 引用本文： | 金永兴,吕俊,吕翔.光波导覆层热膨胀系数对应力双折射影响的分析[J].光学学报,2003,23(5):72-574. |
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| 作者姓名： | 金永兴 吕俊 吕翔 |
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| 作者单位： | 1. 浙江大学光电系,光及电磁波中心,杭州,310027;中国计量学院激光技术研究所,杭州,310034
2. 浙江大学光电系,光及电磁波中心,杭州,310027 |
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| 摘 要： | 用有限元方法计算了硅基光波导器件的应力，得到由应力引起的双折射，从理论上分析了内应力对器件偏振特性的影响。得出结论：硅基与其它层材料热膨胀系数的不同，是引起芯区双折射的主要因素，通过掺杂、调整覆层的热膨胀系数，可以得到双折射系数较小的光波导。
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| 关 键 词： | 波导光学 平面光波导 双折射 有限元 应力 热膨胀系数 掺杂 |
| 收稿时间： | 2002/3/6 |
Analysis of Relation between Thermal Expansion Coefficient of Cladding and Stress Birefringence of Optical Waveguide |
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| Institution: | Received 6 March 2002; revised 16 April 2002 |
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| Abstract: | The residual thermal stress distribution is evaluated in the silicon-based silica optical waveguide with finite element method and the stress birefringence is obtained. The influence of stress on polarization is analyzed. It is concluded that birefringence is induced mainly by the different expansion coefficient between the substrate and glass layers. The birefringence-free planar optical waveguide can be obtained by increasing the level of dopants to match the thermal expansion coefficient of glass layers to that of the substrate. |
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| Keywords: | guiding wave optics stress birefringence planar optical waveguide |
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