| 二元光学元件衍射效率的逐层分析法研究 |
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| 引用本文： | 叶钧,许乔.二元光学元件衍射效率的逐层分析法研究[J].光学学报,1996,16(10):350-1355. |
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| 作者姓名： | 叶钧 许乔 |
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| 作者单位： | 浙江大学高技术现代光学中心 |
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| 摘 要： | 提出了一种有效的分析二元光学元件衍射效率的新方法－逐层分析法，并对四台阶二元器件，就蚀刻深度误差和横向对准误差对器件衍射效率的影响进行了详细的分析和讨论，证明了用该方法分析含有横向对准误差的二元光学元件的衍射效率非常简便有效。
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| 关 键 词： | 衍射光学元件 二元光学 衍射效率 光学器件 |
| 收稿时间： | 1995/7/31 |
Study of Diffraction Efficiency of Binary Optics Elements with Layer by Layer Analysis Method |
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| Ye Jun,Xu Qiao,Hou Xiyun,Yang Guoguang.Study of Diffraction Efficiency of Binary Optics Elements with Layer by Layer Analysis Method[J].Acta Optica Sinica,1996,16(10):350-1355. |
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| Authors: | Ye Jun Xu Qiao Hou Xiyun Yang Guoguang |
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| Abstract: | A new method named Layer by Layer Analysis Method was presented to analyze the diffraction efficiency of binary optical elements. To four step binary optical elements, the effects of fabrication errors, such as depth and alignment errors, on the diffraction efficiency were investigated in detail. It was shown that this method is very convenient and effective to the analysis of diffraction efficiency of binary optical elements with alignment errors. |
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| Keywords: | diffractive optical element (DOE) binary optics diffraction efficiency |
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