光学薄膜的小光斑扫描激光预处理研究

激光预处理是一种提高光学薄膜破坏阈值的新技术。采用小光斑扫描并逐步提高预处理能量的方法，对不同类型的薄膜进行了激光预处理。实验结果发现，除了ＨｆＯ２／ＭｇＦ２多导反射膜外，其它样品的０几率破坏阈值Ｆ０％、发生破坏的最低能量密度值ＦＤｍｉｎ１、不发生破坏的最高能量密度值ＦＮＤｍａｘ以及５０％几率损伤阈值Ｆ５０％都有不同程度的提高。这说明，激光预不仅可以清除薄膜听杂质和缺陷，而且可以改进薄膜的整体性能

Study of Laser Conditioning of Optical Coatings with Small Laser Spot Scanning

Laser conditioning is a new technology to enhance laser damage threshold of the optical coatings. The method of the small laser spot scanning and raising of energy step by step is applied to condiation several various multi-layer reflective coatings. It is found experimentally that the damage thresholds of the reflection coatings, except of HfO2/MgF2 multi-layer coating, such as zero-probability damage threshold F0%, minimum damage energy density FDmin, maximum not damage energy density FNDmax and 50% probability damage threshold F50% are all enhanced. It means that laser conditioning technology not only can eliminate the impurities and defects in the coating, but also can improve the whole properties of the coating.