| 微细光束固化的蒙特卡罗建模 |
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| 引用本文： | 王翔,裴香涛,邵鹏,黄文浩.微细光束固化的蒙特卡罗建模[J].光学学报,2008,28(12):2388-2393. |
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| 作者姓名： | 王翔 裴香涛 邵鹏 黄文浩 |
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| 作者单位： | 中国科学技术大学精密机械与精密仪器系,安徽,合肥,230026 |
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| 基金项目： | 国家863计划(2006AA04Z311)资助课题 |
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| 摘 要： | 光固化是光束与光敏树脂之间的光化学反应,其作用过程对光固化加工分辨率有着直接影响.基于光子输运理论,利用蒙特卡罗方法追踪光子往树脂中的运动轨迹,对曝光光束人射、传输过程进行抽样,建立了微细光束固化模型;利用遗传算法并结合光同化实验重构获得了树脂材料的光学参数;利用该崮化模型,模拟计算了微细会聚紫外光束(λ=365 nm)单点曝光同化过程和固化单元点的形状和大小,分析了不同曝光最对固化结果的影响规律,计算结果与实验结果一致.研究表明,该模型可以有效地对微细光束与光敏树脂作用的复杂过程进行仿真,并能对不同入射光和曝光工艺条件下的固化物进行模拟计算,为微细光固化机理的研究和工艺优化提供了基础.
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| 关 键 词： | 微细加工 光固化 蒙特卡罗法 遗传算法 光子输运 |
| 收稿时间： | 2008/4/22 |
Monte Carlo Simulation Model of Micro Light Beam Solidification |
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| Wang Xiang,Pei Xiangtao,Shao Peng,Huang Wenhao.Monte Carlo Simulation Model of Micro Light Beam Solidification[J].Acta Optica Sinica,2008,28(12):2388-2393. |
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| Authors: | Wang Xiang Pei Xiangtao Shao Peng Huang Wenhao |
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| Institution: | Department of Precision Machinery and Precision Instrumentation;University of Science and Technology of China;Hefei;Anhui 230026;China |
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| Abstract: | Light solidification is a photochemical reaction between the light beam and photosensitive resin,and has a direction relation with light solidification micro-machining resolution. First of all,the movement trajectory of photon in the resin was traced by Monte Carlo simulation. By sampling the exposure photon in the incident and transmission processes,micro light beam solidification model was constructed based on photon transportation theory. Secondly,optical parameters of the resin were reconstructed by com... |
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| Keywords: | micro-machining light solidification Monte Carlo method genetic algorithm photon transportation |
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