| 热应力对非制冷红外焦平面微桥的影响及控制研究 |
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| 引用本文： | 王志,许向东,周东,杨卓,蒋亚东,陈超.热应力对非制冷红外焦平面微桥的影响及控制研究[J].光学学报,2011(3):302-306. |
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| 作者姓名： | 王志 许向东 周东 杨卓 蒋亚东 陈超 |
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| 作者单位： | 电子科技大学光电信息学院电子薄膜与集成器件国家重点实验室; |
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| 基金项目： | 国家自然科学基金(61071032); 国家重点实验室开放基金(KFJJ200917)资助课题 |
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| 摘 要： | 非制冷红外焦平面阵列的微桥结构在微加工工艺中,由于温度的剧烈变化,在薄膜中产生热应力而引起微桥的变形,将对器件产生不利影响.利用有限元分析方法,对微桥在热应力作用下产生的变形进行了分析,提出了两种控制热应变的途径:1)选择一种低热膨胀系数、低杨氏模量的电极材料;2)在电极材料的表面沉积一层SiNx薄膜.仿真结果表明,两...
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| 关 键 词： | 薄膜 非制冷红外焦平面阵列 热应力 有限元分析 微桥结构 形变 |
Study on Effect of Thermal Stress on Microbridges of Uncooled IRFPA and Controlling Methods |
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| Wang Zhi Xu Xiangdong Zhou Dong Yang Zhuo Jiang Yadong Chen Chao.Study on Effect of Thermal Stress on Microbridges of Uncooled IRFPA and Controlling Methods[J].Acta Optica Sinica,2011(3):302-306. |
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| Authors: | Wang Zhi Xu Xiangdong Zhou Dong Yang Zhuo Jiang Yadong Chen Chao |
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| Institution: | Wang Zhi Xu Xiangdong Zhou Dong Yang Zhuo Jiang Yadong Chen Chao(State Key Laboratory of Electronic Thin Films and Integrated Devices,School of Optoelectronic Information,University of Electronic Science and Technology of China,Chengdu,Sichuan 610054,China) |
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| Abstract: | In the micro-fabrication process of microbridges of uncooled infrared focal plane arrays(IRFPA),the microbridges are deformed by the thermal stress in thin films due to the acute temperature changes.Such deformation is harmful to the devices.The deformation of the microbridges is analyzed and two ways to control the deformation are presented: 1) choosing a better electrode material which has a lower thermal expansion coefficient and smaller Young modulus;2) adding another SiNx thin film on the surface of el... |
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| Keywords: | thin films uncooled infrared focal plane arrays(IRFPA) thermal stress finite element analysis(FEA) microbridge structure deformation |
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