| 非球面测量中零位计算全息的测量不确定度分析研究 |
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| 引用本文： | 王小鹏,高志山,马骏,沈华,马云.非球面测量中零位计算全息的测量不确定度分析研究[J].光学学报,2011(1):111-115. |
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| 作者姓名： | 王小鹏 高志山 马骏 沈华 马云 |
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| 作者单位： | 南京理工大学电光学院;西安应用光学研究所; |
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| 基金项目： | 国家自然科学基金(60678048,60977008)资助课题 |
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| 摘 要： | 非球面在光学系统中具有非常重要的作用.基于零位补偿计算全息(CGH)的干涉测量方法,因精度高、信息量大、调校方便,在光学计量和制造业领域受到广泛重视.以F数为4抛物面为测量样品,以光学计量领域比较成熟的平面、球面波象差,采用自准直方法,测出抛物面面形波象差;再用零位补偿CGH方法测量同一块样品,研究零位补偿CGH的误差...
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| 关 键 词： | 测量 非球面 波像差 标准球面 抛物面 干涉测量 |
Investigation of Measurement Uncertainty of Aspheric Surface Based on Null-Computer-Generated Holography |
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| Abstract: | Aspheric surface acts as an important role in optical system.Because of its high precision,large data information and easy alignment,interferometric measurement method based on null computer-generated hologram(CGH) element is widely emphasized in the field of optical metrology and optical manufacture.A paraboloid acting as a special aspheric surface sample is measured in auto-collimated interferometric path by using flats and transmission spheres.Then error data are obtained by means of measuring the same s... |
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| Keywords: | measurement aspheric surface wave-front aberration standard sphere paraboloid interferometric test |
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