| 位错型微机械可变光衰减器的研究 |
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| 引用本文： | 谢晓强,戴旭涵,赵小林,丁桂甫,蔡炳初.位错型微机械可变光衰减器的研究[J].光学学报,2005,25(5):17-718. |
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| 作者姓名： | 谢晓强 戴旭涵 赵小林 丁桂甫 蔡炳初 |
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| 作者单位： | 上海交通大学微纳科学技术研究院微米/纳米加工技术国家级重点实验室薄膜与微细技术教育部重点实验室,上海,200030 |
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| 基金项目： | 国家自然科学基金(50405013)，上海市光科技专项行动计划(022261004)，上海市西部科技合作计划项目(045958007)资助课题。 |
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| 摘 要： | 介绍了一种基于微机械技术实现的可变光衰减器,通过微电磁驱动器改变输入输出光纤之间的径向偏移量来调整衰减量。基于波导传输理论分析确定了器件的结构参量,并通过集成电路微细加工工艺实现了器件的制作和封装。测试结果表明,该可变光衰减器的插入损耗小于1dB,动态范围约35dB,工作电压小于5V,偏振相关损耗小于0.1dB,体积为20mm×15mm×8mm,有望为全光网提供一种低成本,高性能的光通信器件。
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| 关 键 词： | 光学器件 全光网 可变光衰减器 微机械 电磁驱动 |
| 收稿时间： | 2004/10/18 |
Research on an Offset-type Micro Mechanical Variable Optical Attenuator |
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| Xie Xiaoqiang,Dai Xuhan,Zhao Xiaolin,Ding Guifu,Cai Bingchu.Research on an Offset-type Micro Mechanical Variable Optical Attenuator[J].Acta Optica Sinica,2005,25(5):17-718. |
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| Authors: | Xie Xiaoqiang Dai Xuhan Zhao Xiaolin Ding Guifu Cai Bingchu |
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| Abstract: | A variable optical attenuator (VOA) fabricated by micro mechanical technology is presented. Based on micro electromagnetic actuation, the attenuation level is adjusted by changing the radial offset between the input and output optical fiber. The structure parameter was determined through optics, mechanics and magnetic circuit analysis. The device was fabricated and packaged by micromachining technology. The packaged volume of the device is 20 mm×15 mm×8 mm. According to the experiment results, the insertion loss is less than 1 dB, the polarization relevant loss is less than 0.1 dB, dynamic range is larger than 35 dB and the driving voltage is less than 5 V. It promises to be a low cost, high performance passive device for all-optical-networks. |
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| Keywords: | optical devices all optical networks variable optical attenuator micro machining electromagnetic |
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