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振动式微机械陀螺动态特性光学测试
引用本文:康新,董萼良,裘安萍,何小元.振动式微机械陀螺动态特性光学测试[J].光学学报,2006,26(2):02-206.
作者姓名:康新  董萼良  裘安萍  何小元
作者单位:1. 南京理工大学力学与工程科学系,南京,210094
2. 东南大学工程力学研究所,南京,210096
3. 东南大学仪器科学与工程系,南京,210096
摘    要:针对振动式微机械陀螺的设计过程中对微振子动态特性的精确评价问题,提出一种测量微振子动态特性的光学方法。该方法利用高速摄像机获取陀螺微振子在振动时的时间序列图像,然后采用数字图像相关技术对序列图像进行相关计算,以获得微振子在大气中振动的位移、速度和加速度曲线,并由此计算微振子的固有频率和品质因数。该方法对位移的分辨力在亚微米量级,具有较高的测量精度。对文中被测陀螺驱动模态的固有频率测量结果为2061.67 Hz,大气压下的品质因数测量结果为66.67。提出的方法可为微陀螺动态特性的测量提供一种精确、有效的途径。

关 键 词:光学测量  微机械陀螺  固有频率  品质因数  数字相关  时间序列图像
文章编号:0253-2239(2006)02-0202-5
收稿时间:2005-04-19
修稿时间:2005-07-04

Optical Testing of Dynamic Characteristics of a Micro-Machined Vibratory Gyroscope
Kang Xin,Dong Eliang,Qiu Anping,He Xiaoyuan.Optical Testing of Dynamic Characteristics of a Micro-Machined Vibratory Gyroscope[J].Acta Optica Sinica,2006,26(2):02-206.
Authors:Kang Xin  Dong Eliang  Qiu Anping  He Xiaoyuan
Institution:1.Department of Applied Mechanics, Nanjing University of Science and Technology, Nanjing 210094;2. Research Institute of Engineering Mechanics, Southeast University, Nanjing 210096;3. Department of Instrument Science and Technology, Southeast University, Nanjing 210096
Abstract:To evaluate precisely the dynamic characteristics of the resonator of a micro-machined vibratory gyroscope during its design process,an optical method for measuring the dynamic characteristics of a micro-resonator is proposed.In the proposed method,a digital image correlation technique is used to calculate the correlation coefficients among the temporal series images of the micro-resonator captured using a high-speed video camera in order to acquire the displacement,velocity and accelerator curves of the microresonator in the atmosphere,and then the natural frequency and the quality factor of the micro-resonator is obtained accordingly.The proposed approach has a high precision since the vibrating displacement is measured at submicrometer resolution.The natural frequency and the quality factor in atmosphere for the driving mode of the tested gyroscope are measured as 2061.67 Hz and 66.67 respectively.The present method may provide an accurate and effective measurement tool for the evaluation of the dynamic characteristics of a micro-machined vibratory gyroscope.
Keywords:optical measurement  micro-machined gyroscope  natural frequency  quality factor  digital correlation  temporal series image
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